| 摘要 |
A seismic mass (16) is suspended above a substratum (15) by members (22,32) elastic on the (x) axis and members (25,26,35,36) elastic on the (y) axis. Dual excitation is provided by electrostatic means (40) and detection by variation in capacitance to electrodes (41). Electrostatic screening (42) ensures that the detector electrodes have a single sided capacitance to the seismic mass (16) |
