METHOD OF MANUFACTURING STRUCTURE OF NANOMETER SCALE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a structure of nanometer scale for mounting a nanotube represented by a carbon nanotube, without impairing the functional performance of the structure when mounting the nanotube to the fine structure. SOLUTION: The method of manufacturing the structure of nanometer scale by arranging the nanotube in a predetermined direction in a predetermined position, has a first process of irradiating a sample with focusing energy beams and etching a predetermined part to flatten a substrate; a second process of accumulating a pillar-like structure by decomposing organic gas by the focusing energy beams for the purpose of specifying a position and a direction; and a third process for mounting and fixing the nanotube with the accumulated pillar-like structure as the reference of the position and direction. COPYRIGHT: (C)2005,JPO&NCIPI