发明名称 Thin film magnetic memory device and manufacturing method therefor
摘要 A thin film magnetic memory device includes: a TMR element, provided on a main surface of a silicon substrate, operating as a memory element; a buffer layer having a first surface bringing into contact with the TMR element and a second surface, located on the side opposite to the first surface, having an area smaller than that of the first surface; and a bit line, formed of a conductor film and a barrier metal film that bring into contact with the second surface, extending in one direction so as to intersect the TMR element. Thereby, it is possible to provide a thin film magnetic memory device realizing miniaturization of the memory cell and, also, having a high reliability, and a manufacturing method therefor.
申请公布号 US2005087827(A1) 申请公布日期 2005.04.28
申请号 US20040973293 申请日期 2004.10.27
申请人 RENESAS TECHNOLOGY CORP. 发明人 OOISHI TSUKASA
分类号 H01L27/105;G11C11/15;H01L21/8246;H01L27/22;H01L43/08;(IPC1-7):G11C11/15 主分类号 H01L27/105
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