| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring astigmatism strain sensitivity, that is, astigmatism strain correction sensitivity and astigmatism strain generation sensitivity more accurately than that by a conventional method. SOLUTION: In the measurement method of astigmatism strain sensitivity in a charged particle beam exposure device with at least two sets of astigmatism correctors, the astigmatism corrector is driven while keeping conditions which do not allow astigmatism blurring to affect measurement of astigmatism strain. Consequently, a current which flows to a coil of each astigmatism corrector or a voltage applied to an electrode, and astigmatism strain generated then are measured. In the measurement method of astigmatism strain sensitivity in a charged particle beam exposure device features measurement of astigmatism strain correction sensitivity based on the above relations. COPYRIGHT: (C)2005,JPO&NCIPI
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