HIGH-PRECISION FEEDBACK CONTROL FOR ION SCULPTING OF SOLID STATE FEATURES

摘要

The invention provides a method for controlled fabrication of a solid state structural feature. In the method, a solid state structure is provided and the structure is exposed to an ion beam, under fabrication process conditions for producing the structural feature. A physical detection species is directed toward a designated structure location, and the rate at which the detection species proceeds from the designated structure location is measured. Detection species rate measurements are fit to a mathematical model, and the fabrication process conditions are controlled, based on the fitted detection species rate measurements, to fabricate the structural feature.