THIN FILM FORMING COMPONENT AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To obtain a flat thin film without deteriorating superconductivity characteristics and inevitable to a superconductive element for manufacturing a superconductive elements such as microwave, milliwave elements or the like for a high performance Josephson element or high frequency filters employing an oxide high temperature superconductor. SOLUTION: Etching is applied on a substrate previously excluding a region necessitated by an element. Then a film is formed thereon to obtain a flat film of free of sludge on a necessary element whereby there is no sludge in a part into which the element will not be incorporated, even when the film is formed under a condition for obtaining the manufacturing condition of excessive sludge or a high superconductivity characteristics whereby the flat film can be obtained. COPYRIGHT: (C)2005,JPO&NCIPI