| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibration sensor having excellent shock resistance. SOLUTION: This sensor comprises a vibration film 25 formed by laminating integrally a piezoelectric film 21 having electrode films 22, 23 formed on both surfaces and a soft sheet 24, a frame body (ring 28, 29) for supporting the fringe of the vibration film 25, and a deadweight 31 installed on one surface of the vibration film 25 so as to be positioned on the center of the frame body. The piezoelectric film is used without using a piezoelectric ceramics weak to an impact such as dropping and generating easily a crack or a chip. COPYRIGHT: (C)2005,JPO&NCIPI
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