发明名称 A method for coating a semiconductor substrate
摘要 <p>A method of coating a semiconductor substrate material 201 with a coating material 202 consisting of the steps of mixing an adhesion promoter with a coating material 105 and applying the mixture to a semiconductor substrate material 106. The invention also includes means for coating a semiconductor substrate material with a coating material comprising means for mixing adhesion promoters with coating materials and means for applying the mixture of adhesion promoters and coating materials to a semiconductor substrate. <IMAGE></p>
申请公布号 EP1357585(A3) 申请公布日期 2005.04.20
申请号 EP20030252638 申请日期 2003.04.25
申请人 HEWLETT-PACKARD COMPANY 发明人 JEANS, ALBERTA HUA;MEI, PING
分类号 G03F7/085;C09D175/04;G03F7/16;H01L21/027;H01L21/312;(IPC1-7):H01L21/312 主分类号 G03F7/085
代理机构 代理人
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