发明名称 |
A method for coating a semiconductor substrate |
摘要 |
<p>A method of coating a semiconductor substrate material 201 with a coating material 202 consisting of the steps of mixing an adhesion promoter with a coating material 105 and applying the mixture to a semiconductor substrate material 106. The invention also includes means for coating a semiconductor substrate material with a coating material comprising means for mixing adhesion promoters with coating materials and means for applying the mixture of adhesion promoters and coating materials to a semiconductor substrate. <IMAGE></p> |
申请公布号 |
EP1357585(A3) |
申请公布日期 |
2005.04.20 |
申请号 |
EP20030252638 |
申请日期 |
2003.04.25 |
申请人 |
HEWLETT-PACKARD COMPANY |
发明人 |
JEANS, ALBERTA HUA;MEI, PING |
分类号 |
G03F7/085;C09D175/04;G03F7/16;H01L21/027;H01L21/312;(IPC1-7):H01L21/312 |
主分类号 |
G03F7/085 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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