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发明名称
MULTI SILICON FINS FOR FINFET AND METHOD FOR FABRICATING THE SAME
摘要
申请公布号
KR20050035712(A)
申请公布日期
2005.04.19
申请号
KR20030071439
申请日期
2003.10.14
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHOE, JEONG DONG;JO, HYE JIN;KIM, SUNG MIN;LEE, CHANG SUB;LEE, SIN AE;YUN, EUN JUNG
分类号
H01L27/108;H01L21/336;H01L21/8234;H01L29/786;(IPC1-7):H01L27/108
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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