| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluorocopolymer which has functional groups and high transparency in a wide wavelength region, and a resist composition comprising the fluoropolymer. <P>SOLUTION: The fluorocopolymer has units derived from a monomer unit obtained by cyclopolymerization of a fluorinated diene represented by formula (1) and units derived from another monomer unit obtained by cyclopolymerization or units derived from a monomer unit obtained by polymerization of an acrylic monomer. The resist composition contains the fluorocopolymer as a base polymer. The formula(1) is CF<SB>2</SB>=CFCH<SB>2</SB>CH(CH<SB>2</SB>C(CF<SB>3</SB>)<SB>2</SB>(OR<SP>1</SP>))CH<SB>2</SB>CH=CH<SB>2</SB>. In the formula, R<SP>1</SP>is a hydrogen atom, a 20C or lower alkyl group optionally having an etheric oxygen atom, a 6C or lower alkoxycarbonyl group, or CH<SB>2</SB>R<SP>2</SP>(where R<SP>2</SP>is a 6C or lower alkoxycarbonyl group). <P>COPYRIGHT: (C)2005,JPO&NCIPI |
