SUBSTRATE HOLDING APPARATUS

摘要

PURPOSE: A substrate maintaining apparatus is provided to rapidly implement movement of an adhering part by including an outlet with erupting a gas about a sample. CONSTITUTION: An end tip of a substrate(50) is placed on a stand(12). A first absorbing part(13a) and a second absorbing part(13b) adsorb the substrate. A mobile belt(18) is installed transferrable under the substrate. The mobile belt includes an outlet erupting the gas. Transferring parts(15a,15b) convert an ON/OFF of the first and the second absorbing part.