| 摘要 |
PROBLEM TO BE SOLVED: To suppress low a quantity of resin tubes used to supply a cooling medium to a component having a cooling part. SOLUTION: A stage base 50 comprises a plate for supporting a stage, a component 1 that is disposed on the plate and has the cooling part, and a cooling medium duct 41 arranged through the inside of the plate to the inside of the component 1. COPYRIGHT: (C)2005,JPO&NCIPI |
