| 摘要 |
PROBLEM TO BE SOLVED: To provide a particles evaluation device, by which particles generated from an object to be measured such as a ceramic member or the like are evaluated under conditions which are close to actual use environment. SOLUTION: The particles evaluation device includes a housing 2 with its inside kept clean, a holding means 3 of holding the object S to be measured held in the housing 2, a means 4 of causing vibration to the holding means 3, a wafer which is held in the housing 2, provided under the object S to be measured and catches the particles generated from the object S to be measured, and a particles evaluation means 5 that evaluates the surface of the wafer. COPYRIGHT: (C)2005,JPO&NCIPI
|
