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发明名称
Scribing method for semiconductor wafers
摘要
申请公布号
US3392440(A)
申请公布日期
1968.07.16
申请号
US19660545636
申请日期
1966.04.27
申请人
NIPPON ELECTRIC COMPANY, LIMITED
发明人
YANAGAWA TAKAYUKI
分类号
B28D1/00;B28D5/00;H01L21/301
主分类号
B28D1/00
代理机构
代理人
主权项
地址
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