MULTI-EMITTER EVALUATION METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To correctly realize an evaluation of electron emission from individual chips in a multi-emitter. SOLUTION: The multi-emitter having a plurality of electron emission sites is kept at a negative potential; and secondary electrons obtained by entering a primary ray into the multi-emitter are expanded and focused to obtain a surface image of the electron emission sites of the multi-emitter. Then, electrons obtained by applying a bias voltage to the multi-emitter are expanded and focused to obtain an emitted electron image so as to superimpose it on the surface image of the electron emission sites of the multi-emitter. Then, in the surface image of the electron emission sites, the respective operation states of the plurality of electron emission sites in the multi-emitter are evaluated from the presence/absence and the level of brightness of the emitted electron image corresponding to each electron emission site. COPYRIGHT: (C)2005,JPO&NCIPI