| 摘要 |
A sample analyzer is provided to easily detect the change of the detection angle for ions by using a beam irradiating appliance. A sample analyzer includes a beam generator, a beam irradiating appliance, a vacuum vessel(103), at least detection ports(105), a spectrum measurement unit, and a measurement unit movement member. The beam generator is used for generating ion beams(101). The beam irradiating appliance for irradiating ion beams(101). The air vessel is used for maintaining samples(102) of the inner pressure. The detection port is used for selectively guiding scattered ions to the vacuum vessel(103). The spectrum measurement unit is used for measuring the spectrum of the scattered ions guided thought the detection port. The measurement unit moving member is used for moving the spectrum measurement unit in such a manner that the spectrum measurement unit is positioned along a direction of plural scattered ions.
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