| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing member polishing a polished object with a narrow recessed part such as a notch part, without needing a complicated mechanism. SOLUTION: This polishing member 5 of disk shape has a polishing part at least at a peripheral edge part which is uneven with respect to a thickness direction. The unevenness exist on both faces of the disk. The unevenness is formed in such a manner that if one of both faces is projecting, the other is recessed, and if one is recessed, the other is projecting. The polishing member 5 has a sheet member 6 having the polishing part, and a pair of shape holding members 7a, 7b giving unevenness in a thickness direction by holding the sheet member 6 from both sides. The pair of shape holding members 7a, 7b have unevenness in the facing surfaces, and the recess of one shape holding member coincides with the projection of the other shape holding member. In the same way, the projection of one shape holding member coincides with the recess of the other shape holding member. COPYRIGHT: (C)2005,JPO&NCIPI |
