| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent breakdown of a processing object, resulting from collision of an injection nozzle with the processing object due to the trouble of a back-pressure sensor in the processing apparatus, provided with the back pressure sensor constituted to detect the processing object, by having the injection nozzle come close to the processing object. <P>SOLUTION: In the processing apparatus 1 provided with the back pressure sensor 4, the back pressure sensor 4 is provided with a free-movement detecting sensor 43 for detecting the free movement of the injection nozzle 40, which can freely move in the direction opposing to the injecting direction of the air. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
