发明名称 |
Vacuum apparatus and transfer apparatus |
摘要 |
A vacuum apparatus has a process chamber for processing a workpiece and a transfer apparatus for positioning the workpiece in the process chamber and for removing the workpiece from the process chamber. The transfer apparatus has a pair of generally parallel and spaced-apart transfer bodies and a workpiece holder connected to the transfer bodies for supporting the workpiece. A feeding mechanism feeds the transfer bodies in a longitudinal direction thereof to position the workpiece holder and the workpiece in the process chamber.
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申请公布号 |
US6869262(B2) |
申请公布日期 |
2005.03.22 |
申请号 |
US20020090077 |
申请日期 |
2002.03.01 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
YAMASHITA YOSHIHIRO;ENOMOTO YOSHIHIRO |
分类号 |
B65G49/06;B65G49/07;H01L21/02;H01L21/677;H01L21/687;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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