METHOD OF MANUFACTURING MASTER DISK OF OPTICAL INFORMATION RECORDING MEDIUM, PATTERN FORMING METHOD, MASTER DISK, STAMPER, OPTICAL INFORMATION RECORDING MEDIUM AND RESIST

摘要

PROBLEM TO BE SOLVED: To provide a resist with which heat mode recording is possible, the environment resistance of which is high, which can respond to a wide wavelength region, the residual film rate of which in development is high, the line edge roughness of which is small and for which a conventional development facility can be used, and to provide a pattern forming method. SOLUTION: A method of manufacturing a master disk of an optical information recording medium is provided with: a resist layer forming process for forming a resist layer 102 on the upper face of a substrate 101 by using the resist; an exposure process for selectively performing exposure which causes a state change in the resist layer 102; and a development process for performing alkali development on the resist layer 102 after exposure. The resist includes at least Te and O, consists mainly of an inorganic material and includes a stabilizing additive whose solubility with respect to an alkali is lower than that of TeO2. Thus, alkali solubility in a non-exposure part drops. Remarkable improvement effect of the residual film rate and line edge roughness can be obtained, and an excellent pattern can be formed. COPYRIGHT: (C)2005,JPO&NCIPI