OPTICAL ARTICLE AND ITS MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To manufacture an optical article which is free of an external appearance problem such as a crack and maintains an antifouling function for a long period of time. SOLUTION: While supplying a body 41 to be processed with thin-film forming gas M containing an organic metal compound with an organic group having a fluorine atom, a thin-film forming apparatus 10 as a manufacturing apparatus for the optical component supplies the body 41 to be processed with excited discharge gas G' excited by introducing discharge gas G into a discharge space area A under or nearly under atmospheric pressure to form a thin film 42 on the processed body 41. COPYRIGHT: (C)2005,JPO&NCIPI