DISPERSING DEVICE FOR VAPORIZER, VAPORIZER FOR MOCVD USING THE DISPERSING DEVICE, ROD USED FOR THE DISPERSING DEVICE OR VAPORIZER, METHOD OF DISPERSING CARRIER GAS, AND METHOD OF VAPORIZING CARRIER GAS

摘要

PROBLEM TO BE SOLVED: To provide a dispersing device for a vaporizer that prevents the projection of a rod regardless of the pressure of a carrier gas without using any special fixing component and, in addition, joins a plurality of thin film forming materials at a joining section in a state where the materials are distributed in suitable amounts. SOLUTION: In the dispersing device for the vaporizer, the rod 37 which forms a gas passage 35 in cooperation with the internal wall of a hole formed along the transporting route of the carrier gas is inserted into the hole and a dispersing section which disperses a plurality of thin film forming raw materials in the carrier gas introduced into the gas passage 35 is disposed in the middle section of the passage 35. At least the front end section of the rod 37 on the downstream side of the transporting direction of the carrier gas is tapered down and, at the same time, the inner wall of the hole is formed in accordance with the shape of the front end section of the rod 37. The carrier gas in which the plurality of thin film forming materials are dispersed by means of the dispersing section is joined to the downstream-side end section of the gas passage 35 by the joining section. COPYRIGHT: (C)2005,JPO&NCIPI