| 摘要 |
PROBLEM TO BE SOLVED: To provide a miniaturized scanning electron microscope enabling observation of the optional position of a large sample, and capable of easily obtaining a three-dimensional image. SOLUTION: A plurality of electron-optical lens-barrels 1 are disposed face to face with the sample 3 in a flat shape in the frame 5 of a vacuum container. A piezoelectric element scanner 2 scans the position where electron beams are applied to the sample 3 by varying the relative position of the electron optical lens barrels 1 and the sample 3, and adjusts the convergence position of the electron beams with respect to the sample by vertically moving the electron lens-barrels 1. A plurality of the electron lens-barrels may be spherically disposed. COPYRIGHT: (C)2005,JPO&NCIPI
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