Capacitor having RuSixOy-containing adhesion layers

摘要

A capacitor structure includes a first electrode formed on a substrate assembly surface and on one or more side surfaces of a contact opening in the substrate assembly. A high- dielectric constant material is formed on at least a portion of the first electrode and a second electrode is formed on the high-dielectric constant material. At least one of the first and second electrodes comprises an adhesion layer formed of RuSixOy, where x and y are in a range of about 0.01 to about 10. The adhesion layer of at least one of the first and second electrodes may be formed on at least a portion of a silicon-containing region. The adhesion layers may consist of three to five monolayers of RuSixOy.