ROBOT FORK FOR TRANSFERRING WAFER HAVING WAFER SLIDING DETECTION SENSOR TO PREVENT DAMAGE OF WAFER IN WAFER TRANSFER PROCESS

摘要

PURPOSE: A robot fork for transferring a wafer is provided to sense easily a sliding state of a wafer in a wafer transfer process by installing a wafer sliding detection sensor on a plate of the robot fork. CONSTITUTION: A plate is provided to load a wafer thereon. A plurality of wafer fixing rubbers(210) are installed on the plate. A wafer sliding detection sensor(250) is installed on the plate in order to sense a sliding state of the wafer loaded on the plate. The wafer sliding detection sensor is formed with a capacitor sensor. The capacitor sensor is provided to determine the sliding state of the wafer by using a difference between an output voltage in a normal state of the wafer and an output voltage in the sliding state of the wafer.