| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope suitable for carrying out an image shift while restraining deterioration of resolution. SOLUTION: This scanning electron microscope is characterized in that the lower-stage deflector of an upper and lower two-stage deflectors is composed of a multipolar electrostatic deflection electrode, and the electrostatic deflection electrode is arranged on a lens principal surface of an effective objective lens. When an extraction voltage 6 is applied between a negative electrode 4 and an extraction electrode 5, electrons are emitted. The emitted electrons are further accelerated (may be decelerated) between the extraction electrode 5 and a positive electrode 8 set at a ground voltage. The acceleration voltage of a primary electron beam 1 having passed the positive electrode 8 coincides with an electron gun acceleration voltage 7. The electron beam 1 accelerated by the positive electrode 8 is condensed by a condenser lens 9. The open angle of the electron beam 1 or a beam current value thereof is determined by an aperture diaphragm 11 disposed in the downstream. Centering of the diaphragm 11 is carried out by a knob 12. The electron beam 1 having passed the diaphragm 11 is image-shifted by image shift deflectors 20 and 30 used as a scanning deflection function as well, and used to two-dimensionally scan a sample 13. That is to say, deflection intensity of the deflectors 20 and 30 is so adjusted that the electron beam 1 advances straight in the object lens 10. By inputting the deflection intensity of the deflectors 20 and 30 by superimposing a scanning deflection component and an image shift deflection component on each other by using a deflection control power source 40, they are each provided with a scanning deflection function and an image shift deflection function at the same time. COPYRIGHT: (C)2005,JPO&NCIPI
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