WAFER CARRIER MOUNTING EQUIPMENT FOR CONFIRMING ALIGNMENT OF WAFER USING DETECTION SENSOR

摘要

PURPOSE: A wafer carrier mounting equipment is provided to confirm the alignment of wafers and to detect a defect of wafers using a sensor detecting being out of position of wafers. CONSTITUTION: Multistage tables(22) are installed to a body frame(2). Carriers(25) on which wafers(26) are stacked, are seated on the multistage tables. A plurality of perforated grooves(H') spaced apart from each other are formed on the multistage tables. Photosensors(23) are mounted on each end of a plurality of perforated grooves. A control unit(24) attached to a predetermined position of the body frame receives detection values from the photosensors. Detection sensors(3) are formed on the inner surface of a closed rear plate(21) of the body frame.