发明名称 |
Trench capacitor with pillar |
摘要 |
A trench capacitor having a conductive pillar in a central region of a trench. A first plate of the capacitor includes the substrate in the lower portion of the trench and the conductive pillar. The capacitor dielectric is disposed over the conductive pillar and the sidewalls of the trench lower portion. A second plate of the capacitor is a conductive material disposed over the dielectric material. The conductive pillar increases the surface area of the capacitor plates, increasing the capacitance of the capacitor. A top portion of the conductive pillar may be hollow, further increasing the surface area of the capacitor plates.
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申请公布号 |
US2005048715(A1) |
申请公布日期 |
2005.03.03 |
申请号 |
US20030651392 |
申请日期 |
2003.08.29 |
申请人 |
RUPP THOMAS STEFFEN;KUDELKA STEPHAN;MICHAELIS ALEXANDER;RADENS CARL J. |
发明人 |
RUPP THOMAS STEFFEN;KUDELKA STEPHAN;MICHAELIS ALEXANDER;RADENS CARL J. |
分类号 |
H01L21/334;H01L21/8234;H01L21/8242;H01L21/8244;H01L27/108;H01L29/94;(IPC1-7):H01L21/823;H01L21/824 |
主分类号 |
H01L21/334 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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