| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method for manufacturing an ultraviolet light resistant optical material such as a lens or a prism, which has ultraviolet light resistance to light having wavelengths in the ultraviolet light region such as eximer laser and which is suitable for an optical device using high power laser of an ultraviolet light region. SOLUTION: A transparent glass body Z of the optical material having ultraviolet light resistance is obtained by subjecting a porous soot S formed by a VAD process in a soot deposition process 10 to a first heat treatment 1 comprising heating it with microwave in a hydrogen atmosphere, then after substituting the hydrogen atmosphere with an inert gas, subjecting the soot subjected to the first heat treatment to a second heat treatment 2 comprising heating it with microwave while introducing a gaseous fluoride, and after substituting the atmosphere with an inert gas, subjecting the soot subjected to the second heat treatment to a third heat treatment 3 comprising heating it with microwave so as to transparently vitrify and to dissolve the inert gas in the glass. COPYRIGHT: (C)2005,JPO&NCIPI
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