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发明名称
Wafer guides used in cleaning/drying process of semiconductor substrates
摘要
申请公布号
KR100471191(B1)
申请公布日期
2005.02.21
申请号
KR20040083689
申请日期
2004.10.19
申请人
发明人
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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