INSPECTION DEVICE OF CIRCUIT PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a convenient inspection device of a circuit pattern by improving the imaging function when the image of the circuit pattern is compared and inspected.

SOLUTION: The device is provided with an irradiating means for irradiating the surface of a substrate having a plurality of dies where the circuit patterns are formed with a laser beam or a charged particle beam, a detection means for detecting a signal generated from the substrate by irradiation, a storage means for making the signal detected by the detection means into an image and storing it, a comparison means using the image signal of the die designated when the image signal of the die stored in the storage means is compared with a reference image signal of the other die as the reference image signal, and a discrimination means for discriminating a defect from a comparison result in the comparison means.

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