METHOD AND APPARATUS FOR VHF PLASMA PROCESSING,申请号EP20030755332-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR VHF PLASMA PROCESSING
摘要
申请公布号	EP1506564(A2)	申请公布日期	2005.02.16
申请号	EP20030755332	申请日期	2003.04.14
申请人	ENI TECHNOLOGY, INC.	发明人	REYZELMAN, LEONID, E.;SORTOR, JOHN, E.
分类号	H01J37/32;H05H1/46;(IPC1-7):H01J37/32	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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