| 摘要 |
PROBLEM TO BE SOLVED: To uniformize the distribution of plasma in a plasma generation region. SOLUTION: The inside of a vacuum chamber 1 is equipped with: crucibles 31A and 31B provided with an electron gun directly below the same; magnets 32A and 32B for deflection each generating a deflected magnetic field for introducing an electron beam from the electron gun into an evaporation material in the crucible; a substrate dome 7 provided with substrates 6a, 6b...; an electron gun for plasma generation feeding an electron beam into the vacuum chamber 1; and a floating electrode 20 surrounding plasma generated in the chamber 1. The crucibles 31A and 31B are arranged at the same distance from the electron gun for plasma generation. The magnets 32A and 32B for deflection are arranged so that the magnetic fields parallel and vertical to the central axis C of the electron gun for plasma generation are generated, respectively. COPYRIGHT: (C)2005,JPO&NCIPI
|
