| 摘要 |
PURPOSE: An optical switch is provided to reduce size and weight of a semiconductor device by using a vertical micro-mirror driven by an electromagnetic force. CONSTITUTION: An optical switch includes a substrate(1), a plurality of input/output optical fibers(21,22,23,24), a micro-mirror(11), and a driver(13). The input/output optical fibers are used to receive/output optical signals. The micro-mirror uses a sidewall, which is vertical to a surface of a substrate, as a reflective layer. The driver is coupled with the micro-mirror to generate a magnetic force.
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