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发明名称
POLIERSCHEIBE MIT ENDPUNKTERFASSUNGSÖFFNUNG
摘要
申请公布号
DE60201515(T2)
申请公布日期
2005.02.03
申请号
DE2002601515T
申请日期
2002.02.05
申请人
CABOT MICROELECTRONICS CORP., AURORA
发明人
SEVILLA, K.;HICKS, A.;JONES, JEREMY
分类号
B24B37/013;B24B37/20;B24B49/04;B24D7/12;B24D13/14;H01L21/304;(IPC1-7):B24B37/04;B24D13/12
主分类号
B24B37/013
代理机构
代理人
主权项
地址
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