SEMICONDUCTOR WAFER DRYING EQUIPMENT HAVING OPENING/CLOSING VALVE WITH RUGGED REGION

摘要

PURPOSE: A bit of semiconductor wafer drying equipment is provided to improve productivity by replacing easily an opening/closing valve using a rugged region. CONSTITUTION: A bit of semiconductor wafer drying equipment includes a chamber(100), a drying bath(110) in the chamber, a protruded pipeline(115) under the drying bath, an opening/closing valve and at least one deionized water supply pipeline for supplying deionized water into the drying bath. The opening/closing valve(130) is inserted in the protruded pipeline. The opening/closing valve includes a rugged region(123).