| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater free from defective connection even at repetitive rise and fall of temperature by tightly connecting an external terminal with a through-hole. SOLUTION: On the ceramic heater, a screw part of an external terminal having a thermal expansion coefficient larger than that of the through-hole is screwed and connected to a screw hole of the through-hole, and a screw part of the through-hole having a thermal expansion coefficient larger than that of the external terminal is screwed and connected to the screw hole of the external terminal. COPYRIGHT: (C)2005,JPO&NCIPI
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