| 摘要 |
PROBLEM TO BE SOLVED: To provide a large view field projection optical system for the manufacture of a large flat panel display, the optical system having a magnification factor and an aberration correction function for preventing one or a plurality of problems and defects in conventional techniques. SOLUTION: The exposure system for the manufacture of a flat panel display (FPD) includes a reticle stage to support a reticle, a substrate stage to support a substrate, and a reflective optical system to image the reticle onto the substrate. The reflective optical system includes a primary mirror including a first mirror and a second mirror, and a secondary mirror. When an image of the reticle is projected onto the substrate by beams reflected by the first mirror, the secondary mirror and the second mirror, the reflective optical system has sufficient degrees of freedom for both alignment and aberration correction. COPYRIGHT: (C)2005,JPO&NCIPI |
