THIN-FILM TRANSISTOR DISPLAY PLATE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin-film transistor display plate through a small number of photographic processes and to provide a thin-film transistor display plate whose spacer column density is adjusted to facilitate liquid crystal injection and its manufacturing method. SOLUTION: The method for manufacturing the thin-film transistor display plate includes the stages of: forming a gate line on a substrate; continuously laminating a gate insulating film and a semiconductor layer on the gate line; vapor-depositing a lower conductive film and an upper conductive film on the semiconductor layer; photographically etching the lower conductive film and semiconductor layer; vapor-depositing a protection film; exposing a 1st part and a 2nd part of the upper conductive film by photographically etching the protection film; exposing a 1st part and a 2nd part of the lower conductive film by removing the 1st part and 2nd part of the upper conductive film; forming a pixel electrode which covers the 1st part of the lower conductive film; exposing a portion of the semiconductor layer by removing the 2nd part of the lower conductive film; and forming spacer columns on the exposed part of the semiconductor layer. COPYRIGHT: (C)2005,JPO&NCIPI