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发明名称
ETCHING APPARATUS OF METAL SHEET AND ETCHING METHOD OF METAL SHEET
摘要
申请公布号
KR100469034(B1)
申请公布日期
2005.01.20
申请号
KR19960052825
申请日期
1996.11.08
申请人
LG MICRON CO., LTD.
发明人
LEE, IN SEOK
分类号
G03F7/36;(IPC1-7):G03F7/36
主分类号
G03F7/36
代理机构
代理人
主权项
地址
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