DLC FILM AND REFORMING METHOD FOR DLC FILM

摘要

PROBLEM TO BE SOLVED: To provide new optical material useful for the miniaturization, the reduction of cost, and the high performance of various optical devices.

SOLUTION: The reforming method for a diamond-like carbon (DLC) film is characterized by irradiating with a particle beam or an energy beam at least the partial area of the DLC film and enhancing the refractive index of the area, thereby reforming so that the distribution structure of the refractive index is formed in the DLC film. The DLC film reformed by such a reforming method has various kinds of the distribution structure of the refractive index and is utilized as an optical component in various optical fields.

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