| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for cleaning cleaning member which can obtain a high cleaning effect. SOLUTION: The apparatus ultrasonically cleans the surfaces of a cleaning member 100 and a abutting member 20 by an ultrasonic cleaner 30, while driving the polluted cleaning member 100 after scrub cleaning against the abutting member 20 to rub each other in a cleaning liquid 17. It is preferable to provide two abutting members 20 so as to clean the cleaning member 100 alternately, namely, one abutting member 20 is cleaned ultrasonically, while the other abutting member 20 is being cleaned by the cleaning member 100. COPYRIGHT: (C)2005,JPO&NCIPI
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