| 摘要 |
PROBLEM TO BE SOLVED: To make a selective combustion layer hard to peel off in a thin film gas sensor, and to prevent its manufacturing yield from lowering. SOLUTION: In a method of manufacturing the thin film gas sensor, the periphery or both ends of a filmy support membrane are supported by a silicon wafer, and a thin film heater 3 is formed on diaphragm-like support substrates 1, 2 made up so that its periphery or both ends are thick; and its center section is thin, and the thin film heater 3 is covered by an insulating layer 4, and a pair of electrodes 6 for a gas sensitive layer are formed thereon, and the gas sensitive layer (SnO2) 7 made up of a semiconductor thin film is formed, and the selective combustion layer 8 is formed so as to cover the gas sensitive layer 7. The selective combustion layer 8 is formed by using a screen printing method, after making up the gas sensitive layer 7 in a semiconductor process, and a prebake process is carried out at a low temperature, and then a diaphragm working process is carried out, and a main baking process is carried out at a high temperature. COPYRIGHT: (C)2005,JPO&NCIPI
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