| 摘要 |
<p>A piezoelectric pump (1) has a casing (2), an operation space (4) provided in the casing (2) and receiving an operation medium, a suction hole (6) as a suction portion sucking the operation medium into the operation space (4), a discharge hole (7) as a discharge portion discharging the operation medium from the operation space, a back pressure space (5) provided in the casing (2), a piezoelectric element (3) partitioning off a space in the casing (2) into the operation space (4) and the back pressure space (5), and a communication tube (10) as communication means causing the operation space (4) and the back pressure space (5) to communicate with each other.</p> |
