ULTRASONIC VIBRATION APPARATUS AND WET PROCESS APPARATUS USING THE SAME TO EASILY REDUCE FABRICATING COST

摘要

PURPOSE: An ultrasonic vibration apparatus is provided to easily reduce fabricating cost by simplifying a fabricating process. CONSTITUTION: A vibration part(5) is composed of a vibration plate(2) made of one layer or a plurality of layers and a vibrator(3) for generating ultrasonic vibration such that the vibrator is fixed to the vibration plate. In the vibration part, the sum total of the ratios(hereinafter referred to as a thickness/wavelength ratio) of the thickness in the progression direction of the ultrasonic vibration in each layer of the vibration plate and each vibrator to each ultrasonic vibration wavelength has a thickness of integer times of 1/2. The vibrator has a thickness with a thickness/wavelength ratio different from the integer times of 1/2.