发明名称 LOAD ADDITION DEVICE OF WIRE FOR SINGLE CRYSTAL ROD PULLING
摘要 PROBLEM TO BE SOLVED: To provide a device for previously adding a load to a new wire to be replaced. SOLUTION: The load addition device is provided with a holder 13 which holds the upper end of the wire 11 for pulling a single crystal rod, a stress addition means for adding a tensile stress to the wire 11 at the lower end of the wire 11 of which the upper end is held, a heater 17 to heat a part of the wire 11 to which the tensile stress is added and a heater elevation means 18 to move the heater 17 up and down along the wire 11 and over the entire length of the wire 11. The stress addition means may be a weight 12 or a fluid cylinder. It is preferred that a chamber 19 housing at least the stress addition means 12, the holder 13 and the heater 17, and an inert gas circulation means 21 that circulates an inert gas within the chamber 19 are provided. It may be further provided with a holder rotation means 16 that rotates the holder 13 around an axial center of the wire 11 as an rotation center. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005001954(A) 申请公布日期 2005.01.06
申请号 JP20030168844 申请日期 2003.06.13
申请人 SUMITOMO MITSUBISHI SILICON CORP 发明人 OKITA KENJI
分类号 C30B15/30;C30B29/06;(IPC1-7):C30B15/30 主分类号 C30B15/30
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