发明名称 Devices having improved capacitance and methods of their fabrication
摘要 A capacitor formed by a person using only two deposition steps and a dielectric formed by oxidizing a metal layer in an electrolytic solution. The capacitor has first and second conductive plates and a dielectric is formed from the first conductive plate.
申请公布号 US6838353(B1) 申请公布日期 2005.01.04
申请号 US19990246918 申请日期 1999.02.09
申请人 MICRON TECHNOLOGY, INC. 发明人 ROBINSON KARL M.
分类号 H01L21/02;H01L21/288;H01L21/316;H01L21/8242;H01L27/108;(IPC1-7):H01L21/824 主分类号 H01L21/02
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