| 摘要 |
PURPOSE: A method for measuring a thickness of a thin film is provided to reduce an error when measuring the thickness of the thin film by removing intensity of lost light from a theoretical calculation equation. CONSTITUTION: A beam is incident into an object to be measured. A reflective beam, which is reflected from the object to be measured is detected by a sensor of a thin film thickness measurement tool. Among the beams reflected from the object to be measured, reflective beams detected by the sensor of the thin film thickness measurement tool are utilized so as to obtain the thickness of the object to be measured. The object to be measured includes plural layers consisting of different medium layers.
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