发明名称 Method and design for sputter target attachment to a backing plate
摘要 A method of assembling the components of a sputter cathode assembly via thermal expansion of projections provided on one assembly member to provide thermal contact to the other assembly member, and the sputter cathode formed thereby are described. The method forms a temporary mechanical attachment of component members that ends when the components are cooled below the predetermined contact temperature. The method optionally includes mechanically interlocking the assembly components together.
申请公布号 US2004256226(A1) 申请公布日期 2004.12.23
申请号 US20040870260 申请日期 2004.06.17
申请人 WICKERSHAM CHARLES E. 发明人 WICKERSHAM CHARLES E.
分类号 C23C14/34;H01J37/34;(IPC1-7):C25B9/00;C25B11/00;C25B13/00 主分类号 C23C14/34
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