| 摘要 |
PURPOSE:To prevent an optical guide groove shape from being deformed by forming a current passage from the lower surface of a current block layer to eliminate the formation of a multilayer in the block layer. CONSTITUTION:A current passage 20 is formed from the lower surface of a block layer 12. Accordingly, after an optical guide groove 13 is formed at the layer 12, a lower clad layer 14, an active layer 15 and an upper clad layer 16 are formed by a liquid phase epitaxy, and a substrate 11 is then removed to form the passage 20. Thus, even if the layer 12 is not formed of a multilayer structure, it can prevent the shape of the groove 13 from being deformed due to a meltback, the shape of an inverted V-shaped groove 18 can be accurately formed, thereby completely preventing a shoulder from sagging.
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